A tailored solution to achieve power measurement & energy efficiency by monitoring mask aligners
ICP DAS’s voltage attenuator & current transformer DNM-831I-100V-50A, 8-channel True RMS Input Module M-7017RMS-G, and Power Meter Concentrator PMC-5231 were employed to measure power consumption and obtain data from mask aligners. The data collected serve as a reference for the predictive maintenance of machines.
Introduction:
A mask aligner is essential for producing semiconductors such as integrated circuits. It plays a role in transferring a pattern onto the substrate, and the pattern size has reached the nanoscale. This process is known as photolithography.
The photolithography process has advanced rapidly in recent years, and demands for higher production capacity and production rate have increased. In addition, the costs and timeliness of maintaining aging equipment have become key factors affecting firm competitiveness. Therefore, this case study exemplifies how ICP DAS’s energy management solution supports the client in collecting and analyzing energy data regardless of the different types of current that machines use. Furthermore, predictive maintenance of machines was achieved.
ICP DAS’s power measurement solution
In this case, the management staff can adopt DC or AC power measurements to acquire voltage and current data, depending on the type of current that mask aligners use. ICP DAS’s voltage attenuator & current transformer DNM-831I-100V-50A attenuate voltage input and transform current input. The current is then passed through the M-7017RMS-G – an 8-channel True RMS Input Module for obtaining true RMS DC values. Afterward, the data is sent to Power Meter Concentrator PMC-5231 through Modbus RTU Protocol and then to the control center through Modbus TCP Protocol. The data analysis of the power consumption enables the staff to set upper and lower limits and serve as a reference for the predictive maintenance of machines. The system structure diagrams are as follows.
ICP DAS’s DNM-831I-100V-50A features a 1-channel voltage attenuator and a 1-channel current transformer. Its analog input range is ±100 V and ±50 A, and it can attenuate voltage to ±10 V. The use of DNM-831I-100V-50A together with ICP DAS’s remote I/O modules such as I-7017Z-G and M-7017RMS enable power measurement of equipment running with high current. In this case, the client adopts DNM-831I-100V-50A to attenuate mask aligners’ output voltage for power measurement and data acquisition.
8-channel True RMS Input M-7017RMS-G, an integrated RMS-to-DC converter with high precision, computes any complex waveform’s True RMS Value without additional calculation software. Its RMS input range is +150 mVrms to +10 Vrms, and that of each channel can be configured individually. In this case, M-7017RMS-G converts the AC/DC signal sent from DNM-831I-100V-50A to the RMS value.
IIoT Power Meter Concentrator PMC-5231 integrates power data collection, data recovery, the web-based user interface, IF-THEN-ELSE logic control, power demand management, and remote alarm notification. PMC-5231 saves and calculates the RMS value converted by M-7017RMS-G and then transmits the power data to the control center’s computer through Modbus TCP.
Power Meter Concentrator (PMC) series has a built-in web server that lets users check various information on power consumption and directly set system parameters. The administrator can build a power monitoring & control system through settings on the web server, and no additional programming is required. In addition, the PMC series performs the function of IF-THEN-ELSE logic control and remote alarm notification. In this case, once PMC-5231 identifies the anomaly in the values of electric current from mask aligners, notifications are immediately sent to the administrator, no matter if it is connected to the monitoring software installed in the control center’s computer.
Benefits:
DNM-831I series have 3000 VDC intra-module isolation and 3000 VDC channel-to-channel isolation. The isolation feature protects the module from noise interference when the externally connected machine malfunctions. This series can be used with various ICP DAS‘s remote I/O modules for power measurement of equipment using high electric current.
ICP DAS’s I/O modules support various communication protocols and I/O signals such as current, voltage, strain, temperature, etc. The modules feature intra-module isolation and overvoltage protection, ensuring performance and stability.
The Power Meter Concentrator (PMC) series supports various communication protocols such as Modbus TCP/RTU, SNMP, and MQTT. The data can be encrypted and transmitted through MQTT to the cloud monitoring software.
The PMC series performs the data recovery function while network disconnection happens, ensuring complete data transmission. Furthermore, it enables holistic power demand management and offers remote alarm notification for real-time monitoring & control of equipment power usage.
IoTstar - an IIoT cloud management software, your best partner for power data visualization
IoTstar is an IIoT cloud management software developed by ICP DAS. It enables remote monitoring, control, and management of our IIoT controllers such as the WISE/PMC/PMD series, as well as I/O modules, devices, and equipment connected to controllers. Users can install ICP DAS‘s IoTstar on Windows PC with a private cloud. Besides, it can also be installed on a public cloud platform such as Microsoft Azure, IBM Bluemix, Google Cloud, or Amazon AWS.
One of IoTstar‘s core features is Dashboard Service. This allows users to create a customized & shareable dashboard for power data visualization based on their needs. Another feature is Report Service which provides statistics reports, and the information can be searched and reviewed. Besides, the reports can be exported as PDF and Excel files. With IoTstar‘s graphical user interface dashboard, users can obtain information on the machine’s highest power consumption in which time slots. Hence, personnel can effortlessly find underlying reasons for machine shutdown and high power usage, enhancing machine availability.
Conclusion:
The client achieves the objectives of predictive maintenance and troubleshooting through ICP DAS’s tailored current measurement solution. The solution assists on-site personnel in real-time equipment monitoring and maintenance. Hence, this lessens the burden of manual checking, reduces labor costs, and improves overall equipment effectiveness (OEE).
ICP DAS has extensive & decades-long experience in the realm of power management. Our portfolio covers local and international companies across industries. We once assisted a palm oil mill plant in Thailand with a power management solution, achieving two major aims – energy conservation and predictive maintenance – by monitoring the machine’s power consumption. We also supported a display panel manufacturer in improving machine availability and production line efficiency. In this case, integration of ICP DAS’s Smart Power Meter and Power Meter Concentrator enables real-time monitoring of AC current data from inverters.
For decades, we have been consistently offering optimized solutions. We simplify the task of industrial communication, build networking for machines, improve machine availability and OEE, achieve preventive maintenance & predictive diagnosis of equipment, and support clients in embarking upon digital transformation and smart manufacturing. While energy conservation and decarbonization are gaining greater importance, ICP DAS plays a part in supporting our clients to be one step closer to realising sustainable development goals.
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Categories
Electricity Consumption Safety, Energy Management, Predictive Maintenance(PdM), Smart Manufacturing
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ICP DAS was established in 1993 and strongly focuses on innovation and the enhancement of industrial automation technology. ICP DAS continuously endeavors to develop a comprehensive selection of products ranging from remote I/O controllers, distributed I/O modules, I/O data acquisition boards, programmable automation controllers, industrial communication modules, web-related products, motion control systems, SCADA/HMI software to automation solutions for applications critical to energy management, motion automation, smart factories, intelligent buildings, and smart cities. Our ambition is to provide a wide range of high-quality products and versatile applications, together with prompt and efficient services, that can be implemented to assist in the continued success of our clients worldwide.