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The application of ICP DAS’ s solution for leakage monitoring and access control in cleanrooms

By using the ICP DAS’s environmental monitoring modules with the WISE IIoT edge controller, leak, temperature, humidity, and access control information can be easily sent to the control center for remote monitoring and strict control of environmental conditions in the cleanroom.

Introduction:

The customer described in this application is a semiconductor manufacturer that provides the development and production of thick film substrates and customized semiconductor micro-module packaging, which are used in image sensors, optoelectronic semiconductor components, solar cells, and other fields. Since the customer is engaged in the production of high-tech products, all production lines are located in cleanrooms. Compared with other companies, the requirements and specifications for temperature, humidity, and cleanliness in cleanrooms are particularly strict, and these environmental factors must be controlled within a specific range.

The customer needs to use clean water in the production process to clean the semiconductor chip fragments obtained by the dicing process. Due to the fact water sometimes spills on the floor, it causes the production equipment or production line to stop, leading to large losses for the client. In the past, when a water leak occurred, only management personnel could be relied on to inspect and clean the cleanroom; this seriously affected the operation of the plant and personnel deployment.

The customer has looked for other solutions, but due to the complexity of configuring modules such as controllers and liquid leakage sensors (they required programming skills and did not provide real-time alarm functions), such systems are difficult to maintain by management personnel.

Therefore, the management personnel wanted to get a comprehensive solution for environmental monitoring. In addition to monitoring temperature and humidity, and establishing a secure cleanroom access control system, it was also required that in the event of a leak, management personnel be notified as soon as possible to avoid serious damage to surrounding machinery or equipment. The following paragraph describes how the customer reached his goal through the ICP DAS‘s environmental monitoring solution.

ICP DAS's Cleanroom Environmental Monitoring Solution

ICP DAS‘s environmental monitoring solution can be divided into three parts. The first part is the iSN-101/S2/DIN 1-channel liquid leak detection module, which consists of the iSN-101 I/O module and the CA-LLD-DC100X-L030 liquids leak detection cable; together, they provide monitoring of leakage conditions. The second part is the DL-100TM485P remote temperature and humidity data logger, which has an LCD display to show temperature and humidity levels. And the third part is the tM-PD3R3 3-channel isolation digital input and 3-channel power relay module that provides secure access control.

The above three parts of the ICP DAS‘s environmental monitoring solution, together with the WISE-5231 IIoT edge controller, can transmit leakage, temperature, humidity, and access control information back to the control center for remote monitoring. The structure of this solution is as follows:

The iSN-101/S2/DIN 1-channel liquid leak detection module consists of the iSN-101 I/O module and the CA-LLD-DC100X-L030 liquids leak detection cable. The iSN-101 sends the leakage information collected from the CA-LLD-DC100X-L030 to the WISE-5231 IIoT edge controller via Modbus RTU.

The DL-100TM485P remote temperature and humidity data logger measures temperature and humidity in a specific area, and then transmits this information to the WISE-5231 IIoT edge controller through Modbus RTU for environmental monitoring.

The tM-PD3R3 3-channel isolation digital input and 3-channel power relay module transmits the access control data from the access terminal to the WISE-5231 IIoT edge controller through Modbus RTU. When the access control system confirms an employee’s access, the WISE-5231 will unlock the door, and if an employee’s access fails, the WISE-5231 will send an alarm message to the management personnel.

ICP DAS‘s WISE IIoT edge controllers can be widely used for logic control and monitoring in various industrial applications. The built-in IF-THEN-ELSE statement can execute automation logic stably and efficiently. It also provides functions for mathematical operations, scheduling, and sending email notifications. In this case, the client uses the WISE-5231 to send leak, temperature, humidity, and access control data back to the control center via Modbus TCP. The WISE-5231 will send an alarm notification and initiate appropriate measures to monitor the environment when an abnormal situation occurs.

Electrical Panel Wiring

Benefits:

  • Easy-to-operate and no-programming-required module

    WISE series IIoT edge controllers provide simple, easy-to-use web pages for editing control logic. No programming is required. Users only need to click the settings on the HMI to edit the control logic.

  • Data recovery function

    WISE series IIoT edge controllers support data logger and data recovery functions, so users do not need to worry about the risk of data loss.

  • Common communication protocols support for easy integration with devices

    ICP DAS‘s modules and controllers are all support the Modbus RTU protocol, making it easy to integrate them with a variety of devices.

  • The built-in dual watchdog mechanism ensures that the module operates smoothly

    The iSN-101/S2/DIN 1-channel liquid leak detection module and the tM-PD3R3 3-channel isolation digital input and 3-channel power relay module provides a dual watchdog mechanism. The mechanism enables users to set host watchdog to ensure smooth communication between a host computer and I/O modules and pre-set safe value as an emergency mechanism when I/O modules cannot receive commands from the host computer.

ICP DAS’s intelligent environmental monitoring solution 2.0

Advanced leak detection solution

Customers can install the ALM-Horn-BR sound and light alarm module and the iKAN series industrial LED display in the cleanroom. The iSN-101 liquid leakage detection module will trigger the ALM-Horn-BR to issue sound and LED lights as an alarm when the leak happens. At the same time, the WISE series IIoT edge controller will activate the iKAN to display the alarm information in real-time and notify the management personnel to handle it. iKAN series industrial LED displays provide ASCII character encoding standard and Unicode standard for displaying information in multiple languages and support Modbus communication protocol, making iKAN widely used in various PLC, HMI, or SCADA control systems.

Leading temperature and humidity monitoring solution

When the machine room temperature is too high, the WISE series IIoT edge controller can use the IR-712-MTCP universal infrared learning module to send commands to activate the air conditioner via infrared to lower the temperature. At the same time, the temperature and humidity information will be shown on the iKAN display.

Improved access control monitoring

Customers can use the iCAM-ZMR8422X auto focus IR bullet IP camera for access control monitoring. If the employee’s access fails, the built-in IF-THEN-ELSE statement of the WISE series IIoT edge controller can activate the iCAM-ZMR8422X. The camera will capture live images, transmit them to the control center, and send email or line notifications to the management personnel.

Conclusion:

The customer uses a comprehensive environmental monitoring solution from ICP DAS to monitor leaks, temperature, humidity, and access control system in the cleanroom. If an abnormal situation occurs, the management personnel will be immediately notified to ensure that all machines in the cleanroom are safe and running stably. This solution also eliminates the hassle of constant cleaning of cleanrooms.

The areas of application for cleanrooms are quite extensive. In addition to the semiconductor industry mentioned in this case, applications can also be biochemical technology, biotechnology, precision engineering, pharmaceuticals, and hospital operating rooms. ICP DAS‘s environmental monitoring solution can be applied to all of them.

ICP DAS has been working on environmental monitoring solutions for a long time. By implementing various environmental data acquisition modules and networking machinery, ICP DAS helps improve the plant’s overall efficiency and successfully turns it into a “smart factory.”

Related products:

WISE-5231 Intelligent IIoT Edge Controller
IR-712-MTCP Universal IR Learning Module
tM-PD3R3 3-channel Isolation Digital Input and 3-channel Power Relay Module
DL-100TM485P Remote Temperature and Humidity Data Logger with LCD Display
iSN-101/S2/DIN 1-channel Liquid Leak Detection Module with cables
iKAN series Industrial LED Display
iCAM-ZMR8422X Auto Focus IR Bullet IP Camera
ALM-Horn-BR Single Input, Single Output, 8 Blue+8 Red LED, Alarm Siren

ICP DAS View All

ICP DAS was established in 1993 and strongly focuses on innovation and the enhancement of industrial automation technology. ICP DAS continuously endeavors to develop a comprehensive selection of products ranging from remote I/O controllers, distributed I/O modules, I/O data acquisition boards, programmable automation controllers, industrial communication modules, web-related products, motion control systems, SCADA/HMI software to automation solutions for applications critical to energy management, motion automation, smart factories, intelligent buildings, and smart cities. Our ambition is to provide a wide range of high-quality products and versatile applications, together with prompt and efficient services, that can be implemented to assist in the continued success of our clients worldwide.

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