ICP DAS Offers Integrated Automation Solution for FOUP Stocker Systems in Semiconductor Manufacturing
The customer uses ICP DAS’s CAN-205XD series DeviceNet remote I/O slave module and the AXP-9051-IoT programmable automation controller (PAC) to assist the O-brand PLC to drive various mechanisms in the FOUP (Front Opening Universal Pod) stocker, creating a fully automated FOUP stocker system.
Introduction:
In this case, the customer primarily provides automation solutions for advanced processes in cleanrooms, including automated storage systems – FOUP stockers. The FOUP is a special container often used to protect, transport, and store wafers in the semiconductor manufacturing process, serving as a safety barrier during the storage and transportation of wafers. Additionally, the FOUP stocker acts as a transit station in the production process.
FOUP stockers in this case use advanced robotic technology and integrate various motion control technologies and software to provide fully automated FOUP storage, retrieval, and tracking operations. In the original setup, when the customer used O-brand PLCs with other brands’ I/O modules, error codes would appear. Therefore, the customer expects that this problem can be effectively solved with ICP DAS’s solution.
ICP DAS Automation Solution for FOUP Stocker
In this case, after the client developed the driver program using ICP DAS’s AXP-9051-IoT PAC, the data was transmitted to the O-brand PLC and the customized ICP DAS’s CAN-205XD series I/O modules via the Modbus TCP communication protocol. The Modbus TCP communication protocol is then used to send commands to control FOUP stockers and exclude the display of error codes.
The FOUP stockers can be divided into two types: type 8 and type 9. Each type uses 8 and 20 sets of CAN-205XD series DeviceNet remote I/O slave modules respectively. The architecture diagram is as follows:
The CAN-205XD series DeviceNet DI/O slave module complies with the Volume I/II Release 2.0 DeviceNet specifications. It allows users to configure settings or access the status of the DI/DO channels through the standard DeviceNet communication protocol. The CAN-205XD series module also provides a standard EDS (Electronic Data Sheet) file, enabling quick connection to master devices of various brands with standard DeviceNet protocols.
The CAN-205XD module features 8/16 channel isolated digital output (DO) and 8/16 channel isolated digital input (DI), suitable for various architectures including PNP, NPN, TTL, and relay configurations. In this context, the DI channel of the CAN-205XD module receives commands. The DO channel controls components within the FOUP stocker, such as pipeline solenoid valves, changeover valves, pressure control valves, speed control valves, pneumatic cylinders, and electric slide tables. The DI channel issues commands to control the pressure switch and positioning point of the FOUP stocker.
ICP DAS has specially modified the firmware and EDS files of the CAN-205XD module for the customer, eliminating the occurrence of error codes.
The AXP-9000-IoT Series PAC comes with an embedded Windows 10 IoT Enterprise operating system that integrates computing, I/O, and control interface. The AXP-9000-IoT series PAC is equipped with an Intel Core i5-8365UE//Intel Atom E3950 processor and 0/1/2/3/6/7 I/O expansion slots. Additionally, it features various ports such as dual Gigabit Ethernet ports, VGA, HDMI, USB, RS-232, and RS-485.
The local I/O expansion slot can be used with ICP DAS’s I-9K, I-97K, and e-9K series I/O modules, while the remote I/O expansion can be connected to ICP DAS’s Ethernet or RS-485 I/O modules. In this case, the client utilizes the AXP-9051-IoT PAC to write drivers and then sends commands to control the O-brand PLC via the Modbus TCP protocol.
Benefits:
The CAN-205XD series I/O modules are palm-sized DeviceNet slave I/O modules that can be easily installed and save space, making them suitable for placement in small machine control systems.
The CAN-205XD series I/O modules feature Polling and Bit Strobe modes for the DeviceNet I/O connection, which users can select according to their application needs.
The AXP-9000-IoT series PAC has a built-in CPU cooler, which can significantly extend the lifespan of the device.
The AXP-9000-IoT series PAC has built-in VGA and HDMI ports that can be directly connected to a standard monitor, allowing users to easily control HMI or SCADA using a monitor, keyboard and mouse.
The AXP-9000-IoT series PAC has a built-in Windows 10 IoT Enterprise operating system and supports both Universal Windows and traditional Windows applications, providing excellent compatibility with Windows 10 during software development.
ICP DAS's One-stop Selection Service for DeviceNet Products
DeviceNet, based on the CAN bus, is one of the world’s leading industrial automation networks. ICP DAS has been continuously developing DeviceNet products for many years. Alongside DeviceNet master devices compatible with ICP DAS’s PAC-WinPAC/WinCon/LinCon/I-8000 series control units, ICP DAS also offers various DeviceNet slave devices, including PCI interface cards, gateways, I/O modules, and comprehensive solutions. Moreover, ICP DAS provides technical support to help customers address a wide range of DeviceNet-related challenges.
I/O Modules and Expansion Units (Slave Devices): The CAN-8×24 series remote I/O unit and the CAN-2000D series I/O module can integrate sensors and actuators into the DeviceNet network. The CAN-8×24 and CAN-2000D series contain corresponding EDS files for standard DeviceNet master interfaces. The main difference between the CAN-8×24 series and the CAN-2000D series lies in product size and expansion capabilities. The CAN-8×24 series is suitable for centralized control systems, offering flexible I/O expansion options to meet various application needs (the character “x” represents the number of expansion slots). On the other hand, the CAN-2000D series is suitable for distributed control systems. It is a palm-sized independent DeviceNet slave device designed to fit into limited spaces.
Gateways (Slave Devices): The I-7000D and GW-7000D series gateways can integrate devices with different communication protocols. With this series of modules, customers can quickly connect their current equipment to the DeviceNet system.
DeviceNet Master PCI Boards and Expansion Modules (Master Devices): The DeviceNet master series products include the I-8124W-G and I-87124-G DeviceNet master modules, which are designed to work with ICP DAS’s PAC series – WinPAC/WinCon/LinCon/I-8000 series main control units. Additionally, there are the PISO-DNM100 series DeviceNet master universal PCI boards and the I-7565-DNM DeviceNet master converter with a USB interface. All of these products come with a built-in 80MHz 186 CPU, making them suitable for high-performance systems.
Conclusion:
ICP DAS‘s automation solution for FOUP stocker systems makes it easy for customers to integrate equipment from various brands while ensuring stable machine operations.
ICP DAS offers a wide range of I/O modules, gateways, and solutions tailored to meet diverse application needs. The company provides communication interfaces and protocols that ensure safe and reliable data transmission, reaching the pinnacle of IIoT capabilities. For instance, ICP DAS’s GW-7663 PROFINET to Modbus TCP gateway facilitates PLCs using the PROFINET protocol at an aluminum wheel factory in India to access data from Modbus TCP master or slave devices. Additionally, ICP DAS’s ECAT-M801 series EtherCAT multi-axis motion control card aids the Institute of Nuclear Energy Research (INER) in controlling a snake-like robotic arm for the cleaning and dismantling of nuclear energy facilities.
ICP DAS offers strong OEM and ODM capabilities, enabling the creation of fully customized remote I/O modules and solutions to meet individual customer needs. Collaborating closely with customers, ICP DAS helps build automated smart factories.
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ICP DAS was established in 1993 and strongly focuses on innovation and the enhancement of industrial automation technology. ICP DAS continuously endeavors to develop a comprehensive selection of products ranging from remote I/O controllers, distributed I/O modules, I/O data acquisition boards, programmable automation controllers, industrial communication modules, web-related products, motion control systems, SCADA/HMI software to automation solutions for applications critical to energy management, motion automation, smart factories, intelligent buildings, and smart cities. Our ambition is to provide a wide range of high-quality products and versatile applications, together with prompt and efficient services, that can be implemented to assist in the continued success of our clients worldwide.